The included field solvers provide comprehensive coverage of MEMS-specific multi-physics, such as electrostatics, electro-mechanics, piezoelectric, piezoresistive, and damping effects. The suite is filled with MEMS-specific features for accurately and efficiently simulating all types of MEMS, including inertial sensors (accelerometers and gyros), microphones, pressure sensors, resonators, and actuators. Mems design Accelerometer model built in CoventorWare with a process design kit (PDK) for imec’s monolithic MEMS/CMOS process CoventorWare is an integrated suite of design and simulation software that has the accuracy, capacity, and speed to address real-world MEMS designs. Successful MEMS suppliers are using CoventorWare. Successful MEMS suppliers are verifying all aspects of their designs with simulations before sending them to the fab. Increasing competition is driving MEMS suppliers to reconsider their requirements for design and simulation tools.
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